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Globalfoundries improves EUV yield
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Globalfoundries improves EUV yield
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28th October 2017, 11:34
| #1 |
| [M] Reviewer  Join Date: May 2010 Location: Romania
Posts: 153,541
 |  Globalfoundries improves EUV yield Migration to EUV lithography going well Globalfoundries has improved its extreme ultraviolet (EUV) mask yield rate to nearly 65 percent and to make progress in its movement to EUV lithography. Company CTO Gary Patton told the assembled throngs at a Shanghai company shin-dig that chipmakers were finding EUV lithography mask defects in the development of EUV-based process technologies. http://fudzilla.com/news/processors/...oves-euv-yield |
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